Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304

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Abstract

The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel.

Original languageEnglish
Pages (from-to)200-203
Number of pages4
JournalSurface Engineering
Volume19
Issue number3
Publication statusPublished - Jun 2003

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Plasma sources
Austenitic steel
Inductively coupled plasma
Nitrides
nitrides
coils
steels
low frequencies
nitriding
austenitic stainless steels
Nitriding
Stainless Steel
Austenitic stainless steel
stainless steels
hardness
Stainless steel
Hardness
industries
Testing
Industry

All Science Journal Classification (ASJC) codes

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces

Cite this

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title = "Use of H mode in low frequency flat spiralled coil RF inductively coupled plasma source to nitride austenitic steel type AISI 304",
abstract = "The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel.",
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N2 - The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel.

AB - The capabilities of a low frequency flat spiralled coil rf ICP source to nitride austenitic stainless steel type AISI 304 at high rates and to extremely high surface hardness are investigated. For the purpose of testing the applicability of the plasma source in industry, large surface areas were nitrided and the uniformity of the case hardened layers was examined. Results indicate that the H mode rf ICP device improves on previous methods for the nitriding of stainless steel.

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