Simulation of a MEMS piezoelectric energy harvester

Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
Pages177-181
Number of pages5
Publication statusPublished - 18 Oct 2010
EventSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 - Seville, Spain
Duration: 05 May 201007 May 2010

Publication series

NameSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010

Other

OtherSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010
CountrySpain
CitySeville
Period05/05/1007/05/10

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Md Ralib, A. A., Nurashikin Nordin, A., & Salleh, H. (2010). Simulation of a MEMS piezoelectric energy harvester. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010 (pp. 177-181). [5486470] (Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2010).