Optimization of process parameters for threshold voltage and leakage current based on taguchi method

Z. A. Noor Faizah, Ibrahim Ahmad, Pin Jern Ker, P. S. Menon, A. H. Afifah Maheran, S. K. Mah

Research output: Contribution to journalArticle

Fingerprint Dive into the research topics of 'Optimization of process parameters for threshold voltage and leakage current based on taguchi method'. Together they form a unique fingerprint.

Engineering & Materials Science