Nano-porous polysilicon fabrication for micro electro mechanical system (MEMS) drug delivery device

Salina Bt Mohmad, Chien Fat Chau, T. Melvin, S. Atri, C. Kaminski

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Porous polysilicon is a biocompatible, non-toxic and biodegradable material, thus making it a suitable material to be implanted into human body as a drug delivery device. In this study, the method of stain etching in solution consists of HF, HNO3 and H2O in a ratio of 1:3:5 by volume has been used to create the nano-porous structures. The etching time was less than 30 seconds on a LPCVD polysilicon with sheet resistance of ~28 Ω/sq. The topography of the surface was then investigated by Scanning Electron Microscope (SEM) and Atomic Force Microscope (AFM). The resulting porous structure also exhibits a photoluminescence (PL) peak at around 700nm. The fabricated porous polysilicon is suitable as the material for an implantable drug delivery device, which offers significant advantages such as the ability to avoid dose dumping and providing patients with the required drug dosage over an extended period of time.

Original languageEnglish
Title of host publication3rd Kuala Lumpur International Conference on Biomedical Engineering 2006
EditorsFatimah Ibrahim, Noor Azuan Abu Osman, Juliana Usman, Nahrizul Adib Kadri
PublisherSpringer Verlag
Pages329-333
Number of pages5
ISBN (Electronic)9783540680161
Publication statusPublished - 01 Jan 2007
Event3rd Kuala Lumpur International Conference on Biomedical Engineering, Biomed 2006 - Kuala Lumpur, Malaysia
Duration: 11 Dec 200614 Dec 2006

Publication series

NameIFMBE Proceedings
Volume15
ISSN (Print)1680-0737

Other

Other3rd Kuala Lumpur International Conference on Biomedical Engineering, Biomed 2006
CountryMalaysia
CityKuala Lumpur
Period11/12/0614/12/06

All Science Journal Classification (ASJC) codes

  • Bioengineering
  • Biomedical Engineering

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  • Cite this

    Mohmad, S. B., Chau, C. F., Melvin, T., Atri, S., & Kaminski, C. (2007). Nano-porous polysilicon fabrication for micro electro mechanical system (MEMS) drug delivery device. In F. Ibrahim, N. A. Abu Osman, J. Usman, & N. A. Kadri (Eds.), 3rd Kuala Lumpur International Conference on Biomedical Engineering 2006 (pp. 329-333). (IFMBE Proceedings; Vol. 15). Springer Verlag.