The electric field due to a strong capacitive coupling between the induction coil and the walls of the plasma chamber is quite large despite the discharge being in the H-mode in N2 and H2 gases. And as such, this field will interfere with the measurement of the magnetic field thus causing a high degree of measurement error. This paper hence describes the use of a centre-tapped coiled magnetic probe for the measurement of magnetic field profiles in 1-D in the low frequency RF inductively coupled plasma source. From these profiles, an independent method to determine the average electron density is also shown.
|Number of pages||4|
|Journal||Measurement: Journal of the International Measurement Confederation|
|Publication status||Published - 01 Oct 2006|
All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering