Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD

C. W. Lim, H. M. Cave, M. C. Jermy, S. P. Krumdieck

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a numerical model of the liquid precursor droplet flash evaporation and transport is introduced. This droplet model is coupled with the Quiet Direct Simulation (QDS) scheme to model the unsteady flow development in a Pulsed Pressure MOCVD reactor. A preliminary simulation of the PP-MOCVD process including the injection and pump down phase is conducted. The simulation results are consistent with the measured pressure change in the PP-MOCVD process.

Original languageEnglish
Title of host publicationECS Transactions - EuroCVD 17/CVD 17
Pages1251-1258
Number of pages8
Edition8 PART 2
DOIs
Publication statusPublished - 01 Dec 2009
Event17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society - Vienna, Austria
Duration: 04 Oct 200909 Oct 2009

Publication series

NameECS Transactions
Number8 PART 2
Volume25
ISSN (Print)1938-5862
ISSN (Electronic)1938-6737

Other

Other17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society
CountryAustria
CityVienna
Period04/10/0909/10/09

Fingerprint

Metallorganic chemical vapor deposition
Evaporation
Liquids
Unsteady flow
Numerical models
Pumps

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Lim, C. W., Cave, H. M., Jermy, M. C., & Krumdieck, S. P. (2009). Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. In ECS Transactions - EuroCVD 17/CVD 17 (8 PART 2 ed., pp. 1251-1258). (ECS Transactions; Vol. 25, No. 8 PART 2). https://doi.org/10.1149/1.3207730
Lim, C. W. ; Cave, H. M. ; Jermy, M. C. ; Krumdieck, S. P. / Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. ECS Transactions - EuroCVD 17/CVD 17. 8 PART 2. ed. 2009. pp. 1251-1258 (ECS Transactions; 8 PART 2).
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Lim, CW, Cave, HM, Jermy, MC & Krumdieck, SP 2009, Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. in ECS Transactions - EuroCVD 17/CVD 17. 8 PART 2 edn, ECS Transactions, no. 8 PART 2, vol. 25, pp. 1251-1258, 17th International Chemical Vapor Deposition Symposium (CVD-XVII) - 216th Meeting of the Electrochemical Society, Vienna, Austria, 04/10/09. https://doi.org/10.1149/1.3207730

Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. / Lim, C. W.; Cave, H. M.; Jermy, M. C.; Krumdieck, S. P.

ECS Transactions - EuroCVD 17/CVD 17. 8 PART 2. ed. 2009. p. 1251-1258 (ECS Transactions; Vol. 25, No. 8 PART 2).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Lim CW, Cave HM, Jermy MC, Krumdieck SP. Liquid droplet evaporation in simulations of the flow in pulsed-pressure MOCVD. In ECS Transactions - EuroCVD 17/CVD 17. 8 PART 2 ed. 2009. p. 1251-1258. (ECS Transactions; 8 PART 2). https://doi.org/10.1149/1.3207730