Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications

Noor Hidayah Mohd Yunus, Jumril Yunas, Alipah Pawi, Zeti Akma Rhazali, Jahariah Sampe

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO®-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S11 parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ≤ 2, omnidirectional radiation pattern and acceptable maximum gain of > 5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems.

Original languageEnglish
Article number146
JournalMicromachines
Volume10
Issue number2
DOIs
Publication statusPublished - 01 Jan 2019

Fingerprint

Energy harvesting
Antennas
Substrates
Glass
Studios
Microstrip antennas
Air
MEMS
Microwaves

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Yunus, Noor Hidayah Mohd ; Yunas, Jumril ; Pawi, Alipah ; Rhazali, Zeti Akma ; Sampe, Jahariah. / Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications. In: Micromachines. 2019 ; Vol. 10, No. 2.
@article{bea0e9d2830a49ce96bb959e0a87674b,
title = "Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications",
abstract = "This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO{\circledR}-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S11 parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ≤ 2, omnidirectional radiation pattern and acceptable maximum gain of > 5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems.",
author = "Yunus, {Noor Hidayah Mohd} and Jumril Yunas and Alipah Pawi and Rhazali, {Zeti Akma} and Jahariah Sampe",
year = "2019",
month = "1",
day = "1",
doi = "10.3390/mi10020146",
language = "English",
volume = "10",
journal = "Micromachines",
issn = "2072-666X",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "2",

}

Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications. / Yunus, Noor Hidayah Mohd; Yunas, Jumril; Pawi, Alipah; Rhazali, Zeti Akma; Sampe, Jahariah.

In: Micromachines, Vol. 10, No. 2, 146, 01.01.2019.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Investigation of micromachined antenna substrates operating at 5 GHz for RF energy harvesting applications

AU - Yunus, Noor Hidayah Mohd

AU - Yunas, Jumril

AU - Pawi, Alipah

AU - Rhazali, Zeti Akma

AU - Sampe, Jahariah

PY - 2019/1/1

Y1 - 2019/1/1

N2 - This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO®-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S11 parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ≤ 2, omnidirectional radiation pattern and acceptable maximum gain of > 5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems.

AB - This paper investigates micromachined antenna performance operating at 5 GHz for radio frequency (RF) energy harvesting applications by comparing different substrate materials and fabrication modes. The research aims to discover appropriate antenna designs that can be integrated with the rectifier circuit and fabricated in a CMOS (Complementary Metal-Oxide Semiconductor)-compatible process approach. Therefore, the investigation involves the comparison of three different micromachined antenna substrate materials, including micromachined Si surface, micromachined Si bulk with air gaps, and micromachined glass-surface antenna, as well as conventional RT/Duroid-5880 (Rogers Corp., Chandler, AZ, USA)-based antenna as the reference. The characteristics of the antennas have been analysed using CST-MWS (CST MICROWAVE STUDIO®-High Frequency EM Simulation Tool). The results show that the Si-surface micromachined antenna does not meet the parameter requirement for RF antenna specification. However, by creating an air gap on the Si substrate using a micro-electromechanical system (MEMS) process, the antenna performance could be improved. On the other hand, the glass-based antenna presents a good S11 parameter, wide bandwidth, VSWR (Voltage Standing Wave Ratio) ≤ 2, omnidirectional radiation pattern and acceptable maximum gain of > 5 dB. The measurement results on the fabricated glass-based antenna show good agreement with the simulation results. The study on the alternative antenna substrates and structures is especially useful for the development of integrated patch antennas for RF energy harvesting systems.

UR - http://www.scopus.com/inward/record.url?scp=85063568089&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85063568089&partnerID=8YFLogxK

U2 - 10.3390/mi10020146

DO - 10.3390/mi10020146

M3 - Article

VL - 10

JO - Micromachines

JF - Micromachines

SN - 2072-666X

IS - 2

M1 - 146

ER -