Fabrication of platinum membrane on silicon for MEMS microphone

Azrul Azlan Hamzah, Burhanuddin Yeop Majlis, Ibrahim Ahmad

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.

Original languageEnglish
Title of host publicationICSE 2006
Subtitle of host publication2006 IEEE International Conference on Semiconductor Electronics, Proceedings
Pages9-13
Number of pages5
DOIs
Publication statusPublished - 01 Dec 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur, Malaysia
Duration: 29 Nov 200601 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CountryMalaysia
CityKuala Lumpur
Period29/11/0601/12/06

Fingerprint

Microphones
MEMS
Platinum
Membranes
Fabrication
Silicon
Silicon nitride
Nitrides
Chemical vapor deposition
Acoustics

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Hamzah, A. A., Majlis, B. Y., & Ahmad, I. (2006). Fabrication of platinum membrane on silicon for MEMS microphone. In ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings (pp. 9-13). [4266560] https://doi.org/10.1109/SMELEC.2006.381010
Hamzah, Azrul Azlan ; Majlis, Burhanuddin Yeop ; Ahmad, Ibrahim. / Fabrication of platinum membrane on silicon for MEMS microphone. ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings. 2006. pp. 9-13
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Hamzah, AA, Majlis, BY & Ahmad, I 2006, Fabrication of platinum membrane on silicon for MEMS microphone. in ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings., 4266560, pp. 9-13, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, Malaysia, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381010

Fabrication of platinum membrane on silicon for MEMS microphone. / Hamzah, Azrul Azlan; Majlis, Burhanuddin Yeop; Ahmad, Ibrahim.

ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings. 2006. p. 9-13 4266560.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - Platinum membrane with silicon nitride layer is fabricated and analyzed. The membrane, which is designed for MEMS microphone application, is fabricated using sputter platinum and CVD silicon nitride. Membranes with sandwich layer of platinum-nitride-platinum with thickness of 6.35 μm are successfully fabricated. Deflection of the fabricated membrane corresponding to given pressure is measured using Tencor surface profiler. It is observed that deflection at its center is proportional to applied pressure for pressure between 20 Pa to 200 Pa. Average center deflection for applied pressure of 200 Pa is measured to be 0.41 μm. The fabricated platinum membrane is deemed suitable for MEMS microphone application due to its linear deflection response in acoustic pressure range.

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Hamzah AA, Majlis BY, Ahmad I. Fabrication of platinum membrane on silicon for MEMS microphone. In ICSE 2006: 2006 IEEE International Conference on Semiconductor Electronics, Proceedings. 2006. p. 9-13. 4266560 https://doi.org/10.1109/SMELEC.2006.381010