Enhanced performance of 19 single gate MOSFET with high permittivity dielectric material

Ameer F. Roslan, F. Salehuddin, A. S.M. Zain, K. E. Kaharudin, I. Ahmad

Research output: Contribution to journalArticle


In this research, the performance of the 19 nm single gate MOSFET is enhanced through the implementation of the high permittivity dielectric material. The MOSFET scaling trends necessities in device dimensions can be satisfied through the implementation of the high-K dielectric materials in place of the SiO2. Therefore, the 19 nm n-channel MOSFET device with different High-K dielectric materials are implemented and its performance improvement has also been analysed. Virtual fabrication is exercised through ATHENA module from Silvaco TCAD tool. Meanwhile, the device characteristic was utilized by using an ATLAS module. The aforementioned materials have also been simulated and compared with the conventional gate oxide SiO2 for the same structure. At the end, the results have proved that Titanium oxide (TiO2) device is the best dielectric material with a combination of metal gate Tungsten Silicides (WSix). The drive current (ION) of this device (WSix/TiO2) is 587.6 μA/um at 0.534 V of threshold voltage (VTH) as opposed to the targeted 0.530 V predicted, as well as a relatively low IOFF that is obtained at 1.92 pA/μm. This ION value meets the minimum requirement predicted by International Technology Roadmap for Semiconductor (ITRS) 2013 prediction for low performance (LP) technology.

Original languageEnglish
Pages (from-to)724-730
Number of pages7
JournalIndonesian Journal of Electrical Engineering and Computer Science
Issue number2
Publication statusPublished - 01 Jan 2020

All Science Journal Classification (ASJC) codes

  • Signal Processing
  • Information Systems
  • Hardware and Architecture
  • Computer Networks and Communications
  • Control and Optimization
  • Electrical and Electronic Engineering

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