Electrical testing for MEMS's piezoresistive pressure sensor

Mohd Zahrin B. Abd Wahab, Zaliman B. Sauli, Ibrahim Ahmad, Walid B. Suradi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Piezoresistive pressure sensors were fabricated and tested electrically at MIMOS' foundry. The CMOS integrated circuit processing facilities were used to form the piezoresistive sensor. The electrical testing was done using source measuring unit (SMU) of Agilent 4070 and digital multimeter (DMM) of Agilent 3458A. The result showed that 97.6% of the dies or devices out of 2306 in a wafer meet the targeted specification. Therefore we could conclude that the fabrication of piezoresistive pressure sensors at MIMOS's foundry is very reliable.

Original languageEnglish
Title of host publication2003 Asian Conference on Sensors, AsiaSENSE 2003
EditorsDeepak K. Ghodgaonkar, Jumat Salimon, Rabi W. Yousof, Mohamad Nasir Taib, Salmijah Surif, Musa Ahmad, Yook Heng Lee
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages33-35
Number of pages3
ISBN (Electronic)0780381017, 9780780381018
DOIs
Publication statusPublished - 01 Jan 2003
Event2003 Asian Conference on Sensors, AsiaSENSE 2003 - Kebangsann, Malaysia
Duration: 18 Jul 2003 → …

Other

Other2003 Asian Conference on Sensors, AsiaSENSE 2003
CountryMalaysia
CityKebangsann
Period18/07/03 → …

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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  • Cite this

    Abd Wahab, M. Z. B., Sauli, Z. B., Ahmad, I., & Suradi, W. B. (2003). Electrical testing for MEMS's piezoresistive pressure sensor. In D. K. Ghodgaonkar, J. Salimon, R. W. Yousof, M. N. Taib, S. Surif, M. Ahmad, & Y. H. Lee (Eds.), 2003 Asian Conference on Sensors, AsiaSENSE 2003 (pp. 33-35). [1224989] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ASENSE.2003.1224989