Effects of anodisation parameters on thin film properties: a review

Y. H. Wong, M. G. Affendy, S. K. Lau, P. C. Teh, H. J. Lee, C. Y. Tan, S. Ramesh

Research output: Contribution to journalReview article

3 Citations (Scopus)

Abstract

Electrochemical anodisation is a well-received method in the complementary metal-oxide-semiconductor field as it is advantageous; best performed at room temperature which translates into being more affordable and a simple alternative to form nano-structured oxide films for different metals. The quintessential parameters involved allow numerous formations of metal oxide films according to desired morphology and thickness. Therefore, this paper aims to review the effects of anodising parameters such as applied voltage, concentration, temperature, time, current density and post-anodisation annealing among them.

Original languageEnglish
Pages (from-to)699-711
Number of pages13
JournalMaterials Science and Technology (United Kingdom)
Volume33
Issue number6
DOIs
Publication statusPublished - 13 Apr 2017

Fingerprint

oxide films
Metals
Thin films
Oxide films
thin films
metal oxides
CMOS
current density
annealing
electric potential
room temperature
Current density
metals
Annealing
Temperature
Electric potential
temperature
Oxide semiconductors

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Wong, Y. H. ; Affendy, M. G. ; Lau, S. K. ; Teh, P. C. ; Lee, H. J. ; Tan, C. Y. ; Ramesh, S. / Effects of anodisation parameters on thin film properties : a review. In: Materials Science and Technology (United Kingdom). 2017 ; Vol. 33, No. 6. pp. 699-711.
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Effects of anodisation parameters on thin film properties : a review. / Wong, Y. H.; Affendy, M. G.; Lau, S. K.; Teh, P. C.; Lee, H. J.; Tan, C. Y.; Ramesh, S.

In: Materials Science and Technology (United Kingdom), Vol. 33, No. 6, 13.04.2017, p. 699-711.

Research output: Contribution to journalReview article

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T2 - a review

AU - Wong, Y. H.

AU - Affendy, M. G.

AU - Lau, S. K.

AU - Teh, P. C.

AU - Lee, H. J.

AU - Tan, C. Y.

AU - Ramesh, S.

PY - 2017/4/13

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AB - Electrochemical anodisation is a well-received method in the complementary metal-oxide-semiconductor field as it is advantageous; best performed at room temperature which translates into being more affordable and a simple alternative to form nano-structured oxide films for different metals. The quintessential parameters involved allow numerous formations of metal oxide films according to desired morphology and thickness. Therefore, this paper aims to review the effects of anodising parameters such as applied voltage, concentration, temperature, time, current density and post-anodisation annealing among them.

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