Effect of process parameter variations on threshold voltage in 45nm NMOS device

F. Salehuddin, Ibrahim Ahmad, Fazrena Azlee Hamid, A. Zaharim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Taguchi method was used to optimize of the effect process parameter variations on threshold voltage in 45nm NMOS device. In this paper, there are four process parameters (factors) were used, which are Halo Implantation, Source/Drain (S/D) Implantation, Oxide Growth Temperature and Silicide Anneal temperature. The virtual fabrication of the devices was performed by using ATHENA module. While the electrical characterization of the devices was implemented by using ATLAS module. These two modules were combined with Taguchi method to aid in design and optimizer the process parameters. Threshold voltage (VTH) results were used as the evaluation variables. The results were then subjected to the Taguchi method to determine the optimal process parameters and to produce predicted values. The predicted values of the process parameters were then successfully verified with ATHENA and ATLAS's simulator. In this research, oxide growth temperature was identified as one of the process parameters that has the strongest effect on the response characteristics. While the S/D Implantation was identified as adjustment factor to get the nominal values of threshold voltage for NMOS device equal to 0.15V.

Original languageEnglish
Title of host publicationProceeding, 2010 IEEE Student Conference on Research and Development - Engineering
Subtitle of host publicationInnovation and Beyond, SCOReD 2010
Pages334-338
Number of pages5
DOIs
Publication statusPublished - 01 Dec 2010
Event2010 8th IEEE Student Conference on Research and Development - Engineering: Innovation and Beyond, SCOReD 2010 - Kuala Lumpur, Malaysia
Duration: 13 Dec 201014 Dec 2010

Publication series

NameProceeding, 2010 IEEE Student Conference on Research and Development - Engineering: Innovation and Beyond, SCOReD 2010

Other

Other2010 8th IEEE Student Conference on Research and Development - Engineering: Innovation and Beyond, SCOReD 2010
CountryMalaysia
CityKuala Lumpur
Period13/12/1014/12/10

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All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Education

Cite this

Salehuddin, F., Ahmad, I., Hamid, F. A., & Zaharim, A. (2010). Effect of process parameter variations on threshold voltage in 45nm NMOS device. In Proceeding, 2010 IEEE Student Conference on Research and Development - Engineering: Innovation and Beyond, SCOReD 2010 (pp. 334-338). [5704034] (Proceeding, 2010 IEEE Student Conference on Research and Development - Engineering: Innovation and Beyond, SCOReD 2010). https://doi.org/10.1109/SCORED.2010.5704034