A comparative study on MEMS piezoelectric microgenerators

Aliza Aini Md Ralib, Anis Nurashikin Nordin, Hanim Salleh

Research output: Contribution to journalReview article

18 Citations (Scopus)

Abstract

The growing demand of wireless sensor networks has created the necessity of miniature, portable, long lasting and easily recharged sources of power. Traditional, hazardous batteries are rendered unacceptable and the viability of 'green' MEMS energy harvesters has become even more dominant. This paper reviews the state-of-theart MEMS piezoelectric energy harvesters which promise a cleaner environment and eliminate the disposal issue of conventional batteries. Piezoelectric devices are the perfect candidate for implementation in micro generators as they are easily fabricated, are silicon compatible and demonstrate high efficiencies for mechanical to electrical energy conversion. The characteristic equations which govern the conversion of mechanical vibration to electrical power are described in this paper. The typical operating modes for MEMS piezoelectric energy cantilevers which are namely; d31 and d33 are also detailed. Criteria for optimum material suitable for MEMS energy scavengers to produce maximum power output are also outlined. Several MEMS energy harvesters which have been successfully fabricated and tested are also critically reviewed in this paper. Finally a comparison table highlighting the advantages and disadvantages of each work is presented.

Original languageEnglish
Pages (from-to)1673-1681
Number of pages9
JournalMicrosystem Technologies
Volume16
Issue number10
DOIs
Publication statusPublished - 01 Oct 2010

Fingerprint

microelectromechanical systems
MEMS
Harvesters
electric batteries
energy
Piezoelectric devices
cleaners
characteristic equations
disposal
energy conversion
Silicon
electric power
Energy conversion
viability
Wireless sensor networks
generators
vibration
output
sensors
silicon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Ralib, Aliza Aini Md ; Nordin, Anis Nurashikin ; Salleh, Hanim. / A comparative study on MEMS piezoelectric microgenerators. In: Microsystem Technologies. 2010 ; Vol. 16, No. 10. pp. 1673-1681.
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A comparative study on MEMS piezoelectric microgenerators. / Ralib, Aliza Aini Md; Nordin, Anis Nurashikin; Salleh, Hanim.

In: Microsystem Technologies, Vol. 16, No. 10, 01.10.2010, p. 1673-1681.

Research output: Contribution to journalReview article

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